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SMU-10 source measure module
LakeShore
SMU-10 source measure module

DETAILS

SMU-10 source measure module

The First SMU Optimized for Nanoscale Devices

The source measure unit (SMU-10) is the latest module addition to the MeasureReady™ M81-SSM synchronous source measure system. It is designed to handle samples with exceptionally low source noise and high measurement sensitivity. The SMU-10 offers both DC and AC capabilities and an integrated lock-in, providing a comprehensive suite of measurements.

SMU-10 module

All-in-one precision tool

The SMU-10 integrates 6 instruments into a unified solution

MeasurementMeasureSource
DC currentDown to <100 fAUp to 100 mA
DC voltageDown to microvoltsUp to 10 V
AC currentSine (up to 100 kHz), triangle (up to 5 kHz), square (up to 5 kHz)
AC voltageSine (up to 100 kHz), triangle (up to 5 kHz), square (up to 5 kHz)
Lock-inDown to nanovoltsN/A
ResistanceMilliohms to 100 GΩ
SMU-10
Ultra-low noise I-V measurements with nanowatt precision
Increased measurement sensitivity by thermal and offset reduction through AC measurement capabilities 
Synchronous/simultaneous sourcing and measuring removes sampling misalignment—ideal for pulsed I-V testing

Three-terminal FET DC transfer curve

SMU-10-DC graph

SMU-10 characterization of FET spanning 10+ decades of current

Source/measure

When testing multi-terminal devices in a cryogenic probe station, use the M81-SSM with SMU-10 modules to apply voltage or current to the DUT and measure the corresponding current or voltage. The SMU’s topology reduces the number of probe arms by half, significantly minimizing thermal impact. Set compliance limits to protect the DUT from accidental overloads.

Advanced resistance

The M81-SSM’s advanced resistance mode compensates for phase shifts caused by parasitic capacitance, ensuring more accurate resistance measurements. This technique reduces errors significantly, improving measurement accuracy.

3 SMU-10s in-situ with probe station

Minimize thermal impact by using SMU-10 modules with a probe station. In this example, the orange wire is the source, the light blue wire is the drain, the dark blue wire is the gate, and the black wire is the ground.

Four-wire voltage monitoring

Ideal for high-current devices. The Sense-HI and Sense-LO leads enable 4-wire measurements for built-in device voltage monitoring while sourcing currents.

Synchronized sampling

Patented MeasureSync™ technology ensures perfect timing coordination for AC or DC measurements across multiple SMU-10 modules, eliminating data misalignment errors.

SMU-10 specifications

Specifications are subject to change

Voltage

Ranges: 10 mV, 100 mV, 1 V, 10 V

Measure sensitivity: <3 nV1

Source noise (DC to 10 MHz): <0.2 mV RMS, <1.2 mV p-p (typical)

Current

Ranges: 1 nA, 10 nA, 100 nA, 1 µA, 10 µA, 100 µA, 1 mA, 10 mA, 100 mA

Measure sensitivity: <1 fA1

DC output resistance: >10 TΩ (typical)

Source noise (DC to 10 MHz): <5 nA RMS, <25 nA p-p (typical)

Overvoltage protection: ±200 VDC

Maximum power: 1 W, 4-quadrant operation

Magnetic field exposure: Operational up to 50 mT DC

Size: 142 mm (5.58 in) W × 38.9 mm (1.53 in) H × 245 mm (9.63 in) L

1 10 s time constant, 24 dB roll-off

Noise

 RangeSourceMeasure
0.1 Hz to 10 Hz1 kHz0.1 Hz to 10 Hz1 kHz
Voltage
noise
(typical)
10 mV250 nV RMS30 nV/√Hz250 nV RMS27 nV/√Hz
100 mV300 nV RMS30 nV/√Hz300 nV RMS28 nV/√Hz
1 V550 nV RMS30 nV/√Hz550 nV RMS35 nV/√Hz
10 V5 µV RMS80 nV/√Hz5 µV RMS165 nV/√Hz
Current
noise
(typical)
1 nA100 fA RMS
(500 fA p-p)
6 fA/√Hz
(at 10 Hz)
15 fA RMS
(75 fA p-p)
6 fA/√Hz
(at 10 Hz)
10 nA100 fA RMS
(500 fA p-p)
20 fA/√Hz
(at 100 Hz)
45 fA RMS
(225 fA p-p)
20 fA/√H
(at 100 Hz)
100 nA300 fA RMS
(1.5 pA p-p)
60 fA/√Hz
(at 100 Hz)
175 fA RMS
(875 fA p-p)
60 fA/√Hz
at 100 Hz)
1 µA1 pA RMS
(5 pA p-p)
200 fA/√Hz1 pA RMS
(5 pA p-p)
200 fA/√Hz
10 µA5 pA RMS
(25 pA p-p)
1 pA/√Hz6 pA RMS
(30 pA p-p)
1 pA/√Hz
100 µA50 pA RMS
(250 pA p-p)
3 pA/√Hz60 pA RMS
300 pA p-p)
2 pA/√Hz
1 mA500 pA RMS
(2.5 nA p-p)
30 pA/√Hz550 pA RMS
2.75 nA p-p)
20 pA/√Hz
10 mA5 nA RMS
(25 nA p-p)
300 pA/√Hz5.5 nA RMS
27.5 nA p-p)
200 pA/√Hz
100 mA50 nA RMS
(250 nA p-p)
3 nA/√Hz55 nA RMS
1.375 µA p-p)
2 nA/√Hz

Accuracy

 RangeSourceMeasure
DC2
± (% rdg + offset)
Lock-in2,3
± (% rdg + offset)
DC2
± (% rdg + offset)
Lock-in2,3
± (% rdg + offset)
Voltage
accuracy
10 mV0.15% + 300 µV0.15% + 50 nV0.15% + 300 µV0.15% + 50 nV
100 mV0.1% + 300 µV0.1% + 500 nV0.1% + 300 µV0.1% + 500 nV
1 V0.05% + 300 µV0.05% + 5 µV0.05% + 300 µV0.05% + 5 µV
10 V0.05% + 500 µV0.05% + 50 µV0.05% + 500 µV0.05% + 50 µV
Current
accuracy
1 nA0.5% + 300 fA0.5% + 5 fA0.5% + 300 fA0.5% + 5 fA
10 nA0.1% + 300 fA0.1% + 50 fA0.1% + 300 fA0.1% + 50 fA
100 nA0.1% + 300 pA0.1% + 500 fA0.1% + 300 pA0.1% + 500 fA
1 µA0.1% + 300 pA0.1% + 5 pA0.1% + 300 pA0.1% + 5 pA
10 µA0.05% + 3 nA0.05% + 50 pA0.05% + 3 nA0.05% + 50 pA
100 µA0.05% + 30 nA0.05% + 500 pA0.05% + 30 nA0.05% + 500 pA
1 mA0.05% + 300 nA0.05% + 5 nA0.05% + 300 nA0.05% + 5 nA
10 mA0.05% + 3 µA0.05% + 50 nA0.05% + 3 µA0.05% + 50 nA
100 mA0.05% + 10 µA0.05% + 500 nA0.05% + 10 µA0.05% + 500 nA

2 Total system accuracy, 1 year and ±5 °C from Lake Shore calibration, 24 h and ±1 °C from self-calibration, 95% confidence
3 DC to 1 kHz or 10% of source range bandwidth, whichever is lower

Settable resolution

 RangeSource
DCAC4
Voltage
settable
resolution
10 mV1 µV100 nV
100 mV1 µV300 nV
1 V10 µV3 µV
10 V100 µV100 µV
Current
settable
resolution
1 nA10 fA3 fA
10 nA100 fA30 fA
100 nA1 pA300 fA
1 µA10 pA3 pA
10 µA100 pA30 pA
100 µA1 nA300 pA
1 mA10 nA3 nA
10 mA100 nA30 nA
100 mA1 µA300 nA

4 Averaging over 60 NPLCs

Temperature coefficient

 RangeSource2,3Measure2,3
± (ppm rdg/°C + offset/°C)± (% rdg + offset)
Voltage
temperature
coefficient
10 mV20 ppm/°C + 25 µV/°C25 ppm/°C + 25 µV/°C
100 mV20 ppm/°C + 25 µV/°C25 ppm/°C + 25 µV/°C
1 V20 ppm/°C + 25 µV/°C25 ppm/°C + 25 µV/°C
10 V20 ppm/°C + 25 µV/°C25 ppm/°C + 25 µV/°C
Current
temperature
coefficient
1 nA500 ppm/°C + 25 fA/°C500 ppm/°C + 25 fA/°C
10 nA30 ppm/°C + 250 fA/°C35 ppm/°C + 250 fA/°C
100 nA30 ppm/°C + 3 pA/°C35 ppm/°C + 2.5 pA/°C
1 µA55 ppm/°C + 25 pA/°C55 ppm/°C + 25 pA/°C
10 µA20 ppm/°C + 130 pA/°C25 ppm/°C + 125 pA/°C
100 µA20 ppm/°C + 1.5 nA/°C25 ppm/°C + 1.5 nA/°C
1 mA20 ppm/°C + 15 nA/°C25 ppm/°C + 15 nA/°C
10 mA20 ppm/°C + 100 nA/°C25 ppm/°C + 150 nA/°C
100 mA20 ppm/°C + 1.5 µA/°C30 ppm/°C + 1.5 µA/°C

Impedance and bandwidth

 RangeImpedanceBandwidth (typical)
Output (source)Input (measure)SourceMeasure
Voltage
noise
(typical)
10 mV<10 mΩ>500 GΩ (typical)60 kHz60 kHz
100 mV
1 V
10 V
Current
noise
(typical)
1 nA>10 TΩ100 kΩ100 Hz350 Hz
10 nA>1 TΩ10 kΩ500 Hz1.1 kHz
100 nA>100 GΩ1 kΩ1 kHz2 kHz
1 µA>10 GΩ100 Ω4 kHz10 kHz
10 µA>1 GΩ10 Ω10 kHz25 kHz
100 µA>100 MΩ1 Ω50 kHz65 kHz
1 mA>10 MΩ100 mΩ100 kHz>100 kHz
10 mA>1 MΩ20 mΩ100 kHz>100 kHz
100 mA>100 kΩ10 mΩ100 kHz>100 kHz

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