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Glass Bayard-Alpert Ion Gauge - Hot Cathode
Our ETI brand offers various types of vacuum technology including glass and nude hot ion gauges (also called a hot filament, Bayard-Alpert, BA, or BAG gauges or vacuum sensors) for high-vacuum measurement from 10-10 Torr to 10-3 Torr using tungsten filaments. This vacuum technology is popular in the semiconductor industry for the higher accuracy it offers over cold cathode vacuum technology. While hot ion gauges provide better accuracy than cold cathode gauges, hot ion gauges are also more expensive, cannot be cleaned, and are more susceptible to contamination so they don’t last as long.

DETAILS

Glass Bayard-Alpert Ion Gauge - Hot Cathode


Part Numbers: 3200-1103-00, 3200-2103-00, 3200-2103-09, 3200-2203-00, 3202-0102-00, 3202-1102-00, 3202-1202-00, 3202-2102-00, 3202-2102-09, 3202-2112-00, 3202-2202-01

Compatible Vacuum Controllers:

  • MKS Granville Phillips Models 260, 270, 280, 303, 306, 307, 330, 340, 350
  • MKS Instruments 290, 919, 929
  • Perkin Elmer DGC3
  • Varian 831, 836, 842, 844, 845, 880, 971-0003, 971-0014, 971-1008, Multi-Gauge
  • Veeco RG2, RG3, RG21, RG31, RG81, RG83, RG84, RG830, RG840, RG1000, RG1002

Features and Benefits:

  • Low cost vacuum gauge
  • Outgassing and dual filaments for extended vacuum gauge lifetime
  • Reliable hot cathode technology
  • Contamination resistant vacuum transducer and resistant to inrushes of gas
  • Excellent customer support for vacuum transducers