제주장학재단

RF Generators and Matching Networks - 100, 300, 600, 1000 and 2000 Watt 13.56 MHz RF generators for sputtering and RF biasing.
DC Generators - 750 W and 1500 W continuous DC generators with integral 4 way switchboxes.
Pulsed DC Generators - 1000, 1500 and 5000 Watt asymmetric bipolar pulsed DC generators.
HiPIMS - high power, pulsed DC generators to ionize the sputtered material for acceleration, deceleration and flux orientation.