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ATC ORION SERIES SPUTTERING SYSTEMS
ATC ORION SERIES SPUTTERING SYSTEMS
AJA Int
ATC ORION SERIES SPUTTERING SYSTEMS
Compact Systems
Price range: $50,000 - $300,000
10", 12" and 14" chamber Ø
HV and UHV versions
1.5", 2" and 3" sputter sources
Substrate holders to 6" Ø
Load lock
Substrate cassettes
Auto-loading
Computer control
Custom engineered versions
Much more than a tabletop system