AJA Int
ATC FLAGSHIP SERIES SPUTTERING SYSTEMS
Flagship Systems
Price Range: $100,000 - $950,000+
18" to 34" chamber Ø
HV and UHV versions
1" to 8" diameter sputter sources
In-situ tilt source option
Substrate holders to 8" Ø
Load locks
Substrate cassettes and masking
Auto-loading
Computer control
Custom engineered versions