제주장학재단

AJA International ATC-IM Ion Milling Systems are versatile tools which are built in a variety of configurations depending on the specific requirement. Chambers can be either cylindrical or box style and either HV or UHV. SIMS endpoint detection is optional along with AJA's unique SIMS-IS isolation system which allows the SIMS head/detector to be kept under vacuum whenever the main chamber is vented. Systems can include computer control, load-lock, auto-loading, a multi-substrate cassette and mask exchange.
Ion Milling Substrate Holder
AJA manufactures a wide variety of available substrate holders with features such as rotation, manual/motorized incident angle adjustment, heating, water cooling, LN2 cooling, backside gas cooling, and electrical isolation or biasing.

These systems can be configured for a broad range of applications ranging from nano pattern delineation to bulk wafer planarization. AJA manufactures or incorporates either gridless or gridded, RF or DC ion sources, with appropriate grid
materials and curvatures for the
requirement. Systems have been manufactured to employ both inert and reactive/corrosive process gases with the appropriate safety gas box included on the equipment.