AJA Int
ATC-IM SERIES ION MILLING SYSTEMS
AJA International ATC-IM Ion Milling Systems are versatile tools which are built in a variety of
configurations depending on the specific requirement. Chambers can be either cylindrical or
box style and either HV or UHV. SIMS endpoint detection is optional along with AJA's unique
SIMS-IS isolation system which allows the SIMS head/detector to be kept under vacuum whenever
the main chamber is vented. Systems can include computer control, load-lock, auto-loading,
a multi-substrate cassette and mask exchange.
Ion Milling Substrate Holder
AJA manufactures a wide variety of available substrate holders with features such as rotation,
manual/motorized incident angle adjustment, heating, water cooling, LN2 cooling, backside
gas cooling, and electrical isolation or biasing.
These systems can be configured for a broad range of applications ranging from nano pattern
delineation to bulk wafer planarization. AJA manufactures or incorporates either gridless or
gridded, RF or DC ion sources, with appropriate grid materials and curvatures for the
requirement. Systems have been manufactured to employ both inert and reactive/corrosive
process gases with the appropriate safety gas box included on the equipment.