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ATC-E SERIES E-BEAM EVAPORATION SYSTEMS
AJA Int
ATC-E SERIES E-BEAM EVAPORATION SYSTEMS
E-Beam Evaporation Systems
Price range: $140,000 - $650,000+
Box style and cylindrical chambers
HV & UHV versions available
Load lock & cassette options
Rotary or linear e-beam sources
Integrated hoist or hinged door
Single, multi-layer or co-evaporation
Linear e-gun slide available
Planetary, heated and cooled substrate holders
Configured for your application