제주장학재단

AJA International ATC-M Series Multi-Technique Systems are versatile tools that combine various thin film deposition, ion milling and analytical operations in a single chamber (Hybrid Systems) or in multiple chambers (Multi-Chamber Systems) to allow the in-situ transfer of substrates from process to process without breaking vacuum.

These systems can be built in HV or UHV configurations, and in either cylindrical, box or machined chambers styles.

Multi-Techniques employed include:
Multi E-Beam and Sputter
Magnetron Sputtering
E-Beam Evaporation
Thermal Evaporation
Ion Milling
Ion Beam Deposition
Pulsed Laser Deposition
Ellipsometry
Rapid Thermal Anneal
Oxygenation and Nitridization
XPS/AUGER/LEED Analysis
MBE
RHEED
MOS
SIMS
RIBE