제주장학재단

AJA International ATC-M Series Multi-Technique Systems are versatile tools that combine various thin film
deposition, ion milling and analytical operations in a single chamber (Hybrid Systems) or in multiple
chambers (Multi-Chamber Systems) to allow the in-situ transfer of substrates from process to process
without breaking vacuum. These systems can be built in HV or UHV configurations, and in either cylindrical,
box or machined chambers styles.

Multi-Techniques employed include:
Multi E-Beam and Sputter/Magnetron Sputtering/E-Beam Evaporation /Thermal Evaporation
Ion Milling/Ion Beam Deposition/Pulsed Laser Deposition/Ellipsometry/Rapid Thermal Anneal
Oxygenation and Nitridization/XPS/AUGER/LEED Analysis/MBE/RHEED/MOS/SIMS/RIBE