제주장학재단

Neocera Ion Energy Spectrometer (IES-200) is an Electrostatic Retarding Fieldtype Spectrometer. Ions of different kinetic energy, arriving at the IES sensor are separated from electrons, discriminated by their energy, and collected by the Spectrometer. The spectrum displayed will provide information on the most important ‘figure-of-merit’ of the PLD deposition process (ie kinetic energy distribution of the ions arriving at the growth substrate).

The spectral distribution function F(E) ≡ dN(E)/dE is the derivative of the measured N(E) where N(E) is the number of ions with energy greater than E. F(E) provides the PLD user quantitative information about the PLD process.