제주장학재단

Neocera multi-target carousels are designed to provide optimum film properties through improved target erosion characteristics. The targets rotate about their axes and also raster about the axis of the carousel, exposing fresh surface to each pulse of the laser. Rotation alone will lead to non-homogeneous erosion of the target surface and this is avoided by a combined rotation and rastering of the targets. For depositing epitaxial films and multilayer heterostructures with reproducible and optimum film properties, these target carousel features are critical. The targets do not need sanding or resurfacing.